RW Herfst | TU Delft Repository

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RW Herfst

Abstract (1)

Conference paper (2)

Journal article (1)

4 records found

1

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014) - RW Herfst (author), W Klop (author), M Eschen (author), TC van den Dool (author), NB Koster (author), H. Sadeghian Marnani (author)

High-throughput parallel SPM for metrology, defect, and mask inspection

Conference paper (2014) - H. Sadeghian Marnani (author), RW Herfst (author), TC van den Dool (author), W.E. Crowcombe (author), J Winters (author), GFIJ Kramer (author)

Parallel scanning probe microscope comes of age

Abstract (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), W.E. Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014) - H. Sadeghian Marnani (author), TC van den Dool (author), W.E. Crowcombe (author), RW Herfst (author), J Winters (author), GFIJ Kramer (author), NB Koster (author)