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RJ
R. Jager
Academic Work (6)
Conference paper (1)
Journal article (1)
Report (4)
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6 records found
1
Optimum dose for shot noise limited CD uniformity in E-beam lithography
Journal article (2004) -
P. Kruit (author)
,
S. Steenbrink (author)
,
R. Jager (author)
,
MJJ Wieland (author)
Design report maskless system, rapport aan Mapper Lithography B.V.
Report (2002) -
R. Jager (author)
System optimization model description, rapport aan Mapper Lithography B.V.
Report (2002) -
R. Jager (author)
Overview of MAPPER system concept
Report (2002) -
R. Jager (author)
Design of the electron optical part of the mapper machine.
Report (2001) -
R. Jager (author)
,
P. Kruit (author)
Failure analysis of an eletrical drive system with a transverse flux machine (TFM)
Conference paper (2001) -
R. Jager (author)
,
G Dupain (author)
,
S.W.H. de Haan (author)
