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Vdovin, G. (author), Middelhoek, S. (author), Sarro, P.M. (author)The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m...journal article 1997
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- Kwa, T.A. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1997
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- French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1996
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- Hijzen, E.A. (author), Schooneveld, E.M. (author), van Eijk, C.W.E. (author), Hollander, R.W. (author), Sarro, P.M. (author), van den Bogaard, A. (author) journal article 1994
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- Sarro, P.M. (author) doctoral thesis 1987